I kii te Poutāpeta Tuarua o ASML me te Tīma R विषय High-NA EUV Greet Storms i kōrero ia i ngā rā whakamutunga e tāea ana te whakangungu o ngā pūnaha High-NA EUV lithography ki te hihiri ki te hanga nui, or HVM. I te wā e piki ana te nui o ngā hononga ki ngā kiritaki puta noa i te ao, kua whakatikatika a ASML i te hangarau ki te whakahuri i te kaha o te kāinga ki ngā taumata e taea te hanga, i te pūrongo i te huarahi whakatipu utu mō te ahumahi semiconductor mō te tekau tau kei te heke mai.
Ka pahemo te Global Wafer Exposures i te 1.35 Miriona i te wā i te pūnaha e whakaatu ana i te hangarau HVM
I kii a Storms ko te nui o ngā waifā e whakamahia ana i ngā pūnaha High-NA EUV o te ao, or EXE, kua pā atu i te 1.35 miriona, ka tere ake te ako i ngā tikanga me te whakaritenga HVM. I te wa e whakaaetia ana te pūnaha EXE:5200B, i eke te rātā ki te 135 waifā ia haora i te wā e whakamātau ana, e whakaatu ana i te kaha e tika ana mō te hanga nui. E tekau ngā pūnaha High-NA EUV kua whakatūria i ngā pae kiritaki e whā e tū ana i te ao, ā, e toru ngā pūnaha atu kei te tukuna, kei te whakatūria.
Kua whakaatu hoki ngā pūnaha he tino tika te taurite i waenga i ngā mīhini me te mahi tōna. Kua pikinga te wātea i runga i te ao i te pūnaha High-NA EUV ki te 84% ā, e whakaarohia ana ka tae ki te 90% i te mutunga o te 2026, me te whāinga pea teitei kei te 93%. I te tango i ngā wheako mai i tōna papa NXE kua whakatūria, kua whakapai a ASML i ngā āheinga whakaaturanga me te whakauru i ngā whakaūtanga ki te aukati i ngā hapa e pā atu ana, me te piki i te ūkaipō o ngā pūnaha.
Ka uru te High-NA EUV ki te hanga rorohiko-rapata me te whakaiti i ngā utu mō ngā tikanga tamariki e tari ana i te Whakataunga kotahi
I kii hoki a Storms kua tae te High-NA EUV ki tetahi tohu nui me te whakamahi tuatahi i te hanga nui o ngā rorohiko rapata. Mō te whakanuia o te mahara, ka taea e te whakaahua High-NA te tautoko i te whakawhanaketanga tonu o te maha atu e rima ngā paerewa 2D DRAM o nāianei.
Ki te whakataurite ki te 0.33-NA EUV, ka hiahia pea ki ngā tikanga he pāngia-nui, e te pitosia-kua pā atu ngā pūnaha 0.55-NA reira ka taea te piki i ngā paparua ina whakamahia te whakaahua kotahi. Ko te whakakapi i ngā whakaahua maha i te whakaahua kotahi ka taea te whakaiti i te uaua o ngā tikanga, ngā reiti hapa, te wā huri, me ngā utu hanga katoa i te wā e pupuri ana i te whakamātau tikanga me te pā tuhinga i ngā pātea iti.
Kua whakawhanakehia e ASML ngā otinga pāngarau mō ngā wero hangarau e pā ana ki te hanga nui. Ko te papa EXE e whakamahi ana i ngā algorithima tiaki katote, whakatika mō te hōhonu, me te 148 mm te hoahoa kawhiu waifā ki te whakarato i te āhei e tatari ana i te hōhonu o te mātau o te neke neke o te 30 nm teitei.
Ki te whakautu ki te raru o te hantaka-rōpū o te High-NA EUV, e whakamahi ana a ASML i te 175 μm te Huarahi Whiwhi Tūnga e hangai ana mō te hanga nui, e whakarato ana i te whiringa hoahoa teitei. I ngā tono DRAM, ka hiahiatia te tāpae noa mō ngā hoahoa rorohiko me ngā whakaritenga hua rua, engari kāore he mea e hiahiatia.
Ko te High-NA EUV ka waihanga hoki i ngā wāhi hoahoa hou mō ngā hoahoa rorohiko 2D. Ko tōna painga te whakarite i ngā pātea iti ki te whakamahia i te whakaahua kotahi, ka whakapai ake i te whai i ngā hononga me te whakaheke pea i te nui o ngā paparua kōpae e hiahiatia ana. Hei tauira, ka taea te whakakapi i te hoahoa taonga rorohiko 2D i te hanga uaua i ngā wā e hiahiatia ana e rua ngā paparua kōpae me te kotahi te paparua puna, e piki ana i te tupu o ngā pūnaha rorohiko me te whakapai ake i te whakakotahi hoahoa.
Whāinga Tere ki te tae ki te 180 WPH i runga i te papa ahuru 10-tau
E mōhio ana, ka whakamahere a ASML ki te piki i te tere o ngā papa EXE i a ia e tango ana mai i te EXE:5200B ki te whakatautau kei te haere mai, te EXE:5400E. Mā te piki i te mana pūhaka EUV i te 600 W ki te 1,000 W, te tere tere i ngā waifā me te whakahaere reticle, me te whakauru i te rongoā PEP, ka noho a ASML ki te piki i te tere whakamātau ki te 180 waifā ia haora i te tau 2030.
I tāpiri a Storms, kua whakatūria e ASML he rautaki whānui mō tōna hangarau 0.55-NA EUV, me te telaanga papatipu e taea te tautoko te whakawhanaketanga e pā atu ki te tekau tau. Mā te whakakotahi i te whakatinoī teitei, te āheinga hoko kotahi, te piki o te whakangungu, me ngā whakahou hou, e tū ana te papa ki te tautoko i ngā whakamahere whakatū i ngā rārangi teitei te tukanga o te ahumahi semiconductor mo ngā tau kei te heke mai.